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Rong Hsu Patents
Inventor:
Hsu; Rong
Address:
Cupertino, CA
No. of patents:
3
Patents:




Patent Number Title Of Patent Date Issued
6429132 Combination CMP-etch method for forming a thin planar layer over the surface of a device August 6, 2002
A combination CMP-etch method for forming a thin planar layer over the surface of a device includes the steps of providing a substrate including a plurality of surface projections defining gaps therebetween, forming an etchable layer on the substrate, performing a CMP process on the etch
6277748 Method for manufacturing a planar reflective light valve backplane August 21, 2001
A method for manufacturing a planar reflective light valve backplane includes the steps of providing a substrate (e.g., a reflective backplane) including a plurality of surface projections (e.g., pixel mirrors) defining gaps therebetween, forming an etch-resistant layer on the substr
6252999 Planar reflective light valve backplane June 26, 2001
A planar wafer based device (e.g., a reflective light valve backplane) includes a substrate having a plurality of surface projections (e.g., pixel mirrors) defining gaps therebetween, an etch-resistant layer formed on the substrate, and a fill layer formed on a portion of the etch-re


 
 
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