| Patent Number |
Title Of Patent |
Date Issued |
| 6150185 |
Methods of manufacturing and testing integrated circuit field effect transistors using scanning |
November 21, 2000 |
| Scanning Electron Microscope (SEM) analysis is used to detect undesired conductive material on the gate sidewall spacers. The undesired conductive material is then etched from the sidewall spacers if the undesired material is detected by the SEM analysis. More specifically, integrated |
| 6111637 |
Apparatus and method for examining wafers |
August 29, 2000 |
| A method and an apparatus for examining wafers includes a wafer cassette having a capacity for holding a plurality of wafers located on each of first and second locaters. The wafer cassettes are fixedly held on the first and second locaters during the wafer examination. A first indicator |
| 5746832 |
Apparatus for depositing particles onto a wafer |
May 5, 1998 |
| An apparatus for depositing particles onto a wafer comprises a particle generator; particle size controller connected to an output terminal of the particle generator, a first transmitting tube connected to an output of the particle size controller; a second and a third transmitter connec |
| 5654205 |
Apparatus and method for depositing particles onto a wafer |
August 5, 1997 |
| An apparatus for depositing particles onto a wafer comprises a particle generating means; particle size controlling means connected to an output terminal of the particle generating means; a first transmitting tube connected to an output of the particle size controlling means; second and |
