| Patent Number |
Title Of Patent |
Date Issued |
| 7098117 |
Method of fabricating a package with substantially vertical feedthroughs for micromachined or ME |
August 29, 2006 |
| A vacuum or hermetic packaged micromachined or MEMS device and methods for manufacturing the device so that the device has at least one substantially vertical feedthrough are provided. In a first embodiment, the method includes: providing a MEMS device fabricated on a first side of a |
| 6958531 |
Multi-substrate package and method for assembling same |
October 25, 2005 |
| A multi-substrate, microsystem package and a method for assembling same including a high-density flexible connector array are disclosed for use in compact and multi-substrate packages containing circuits, sensors, and actuators in a re-workable and modular approach. The package is design |
| 4907748 |
Fuel injector with silicon nozzle |
March 13, 1990 |
| A fuel injector has a silicon micromachined nozzle plate which coacts with a fuel flow valve to control fuel flow out of the fuel injector. |
| 4768751 |
Silicon micromachined non-elastic flow valves |
September 6, 1988 |
| A valve assembly for controlling fluid flow includes a valve plate and a nozzle plate which are not attached to each other but can be moved into and out of contact with each other. The valve plate has an opening for passing an actuator and fluid. A nozzle plate has an opening for passing |
| 4756508 |
Silicon valve |
July 12, 1988 |
| A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice. |
| 4742265 |
Spark plug center electrode of alloy material including aluminum and chromium |
May 3, 1988 |
| A spark plug for providing an ignition spark has a center electrode. At least a portion of the center electrode contains an alloy material from an alloy family of M-CrAlY wherein M is nickel, cobalt, iron or a combination of these elements and Cr is chromium, Al is aluminum, Y is an elem |
| 4647013 |
Silicon valve |
March 3, 1987 |
| A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice. |
| 4628576 |
Method for fabricating a silicon valve |
December 16, 1986 |
| A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice. |
| 4477245 |
Flame monitoring safety, energy and fuel conservation system |
October 16, 1984 |
| A flame monitor for a burner comprises an oscillator which generates a signal at a characteristic frequency, a flame modulator connected to the oscillator and the burner for modulating the flame which produces an electromagnetic signal at the same frequency and a signal detector for |
| 4386453 |
Method for manufacturing variable capacitance pressure transducers |
June 7, 1983 |
| A method for manufacturing variable capacitance pressure transducers and an intermediate article of manufacture produced in the practice of this method. In the method, a wafer of doped silicion or other semiconductor material has portions of the semiconductor material removed from spaced |
| 4277814 |
Semiconductor variable capacitance pressure transducer assembly |
July 7, 1981 |
| A capacitive pressure transducer assembly having a semiconductor transducer device, a substrate, and a cover for use in conducting a fluid pressure to be sensed to the exterior surfaces of the transducer device. The transducer device may have a glass, silicon or other nonconductive m |
| 4261086 |
Method for manufacturing variable capacitance pressure transducers |
April 14, 1981 |
| A method for manufacturing variable capacitance pressure transducers and an intermediate article of manufacture produced in the practice of this method. In the method, a wafer or doped silicon or other semiconductor material has portions of the semiconductor material removed from spaced |
