| Patent Number |
Title Of Patent |
Date Issued |
| 7342703 |
Micro-mechanical beam protective support structures wherein at least two adjacent support struct |
March 11, 2008 |
| An arrangement for use with a micro-mechanical beam, in which a plurality of support structures are configured to directly attach to the micro-mechanical beam to increase bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness. At least tw |
| 7319372 |
In-plane mechanically coupled microelectromechanical tuning fork resonators |
January 15, 2008 |
| There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for exa |
| 7177068 |
Apparatus, method and system for providing enhanced mechanical protection for thin beams |
February 13, 2007 |
| An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical bea |
| 7176540 |
Method for producing micromechanical structures and a micromechanical structure |
February 13, 2007 |
| A method for producing micromechanical structures, in which a functional layer is deposited onto a sacrificial layer, and the sacrificial layer is removed again for the production of at least one mechanical functional element, which is characterized by a surface barrier layer, with which |
| 7026184 |
Method of fabricating microstructures and devices made therefrom |
April 11, 2006 |
| Methods of fabricating micromachined devices are disclosed, as are micromachined (MEMS) devices fabricated using such methods. According to one embodiment, the method includes forming a composite thin film layer stack on a substrate such that composite thin film layer stack comprises |
| 6960536 |
Method for producing integrated microsystems |
November 1, 2005 |
| A method for producing a microsystem that has, situated on a substrate, a first functional layer that includes a conductive area and a sublayer. Situated on the first functional layer is a second mechanical functional layer, which is first initially applied onto a sacrificial layer situa |
| 6905615 |
Method of manufacturing a micromechanical component |
June 14, 2005 |
| A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium |
| 6901800 |
Differential in-plane tunneling current sensor |
June 7, 2005 |
| A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at leas |
| 6895818 |
Differential in-plane tunneling current sensor |
May 24, 2005 |
| A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at leas |
| 6867061 |
Method for producing surface micromechanical structures, and sensor |
March 15, 2005 |
| A method is described for producing surface micromechanical structures having a high aspect ratio, a sacrificial layer being provided between a substrate and a function layer, trenches being provided by a plasma etching process in the function layer, at least some of these trenches e |
| 6856067 |
Device and method for electrostatically levitating a disk and method for using an electrostatic |
February 15, 2005 |
| A device for levitating a disk including three bottom electrodes situated below the disk and equidistantly around a top circle and three top electrodes situated above the disk, opposite the three bottom electrodes, and situated equidistantly around a bottom circle. Two bottom reference |
| 6825057 |
Thermal membrane sensor and method for the production thereof |
November 30, 2004 |
| A process for manufacturing a membrane sensor over a silicon substrate, preferably a thermal membrane sensor. A thin layer of silicon carbide or silicon nitride is deposited over an area of porous silicon formed in the surface of the substrate, and then openings that extend as far as the |
| 6808640 |
Micromechanical part and method for its manufacture |
October 26, 2004 |
| A method for manufacturing a micromechanical part, having a plurality of components that move with respect to one another, from a substrate, with a conductive coating being applied to at least one facing surface of the plurality of components that move with respect to one another. |
| 6790699 |
Method for manufacturing a semiconductor device |
September 14, 2004 |
| A method for manufacturing a semiconductor device includes the steps of providing a substrate, depositing a monocrystalline sacrificial layer onto the substrate, depositing a monocrystalline function layer onto the sacrificial layer, and removing at least part of the sacrificial layer |
| 6726815 |
Electrochemical etching cell |
April 27, 2004 |
| An electrochemical etching cell (1) is proposed for etching an etching body (15) made at least superficially of an etching material. The etching cell (1) has at least one chamber filled with an electrolyte, and is provided with a first electrode (13), which at least superficially has a f |
| 6677249 |
Method for manufacturing breakaway layers for detaching deposited layer systems |
January 13, 2004 |
| A method for removing layers or layer systems from a substrate and subsequent application onto an alternative substrate. A porous breakaway layer is formed by anodization in hydrofluoric acid. Optionally, a stabilizing layer with lower porosity is previously produced on top of the br |
| 6672732 |
Micromechanical oscillating device |
January 6, 2004 |
| A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsi |
| 6655834 |
Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting mem |
December 2, 2003 |
| A sensor, in particular thermal sensor, having a silicon element and a largely self-supporting membrane layer equipped with at least one sensor element, is proposed. The membrane layer is furthermore spaced away from the silicon element by way of at least one contact column and is at lea |
| 6648389 |
Process for manipulating components, a microtool for implementing the process, and a process for |
November 18, 2003 |
| A microtool for manipulating components is proposed. A component is held with the microtool by at least one gripper arm having a gripping surface, the gripper being movable by an actuator structure. Also provided is a device for releasing the held component from the gripping surface, whe |
| 6645800 |
Method for the production of a field-effect structure |
November 11, 2003 |
| In a method for the production of a field-effect structure and a field-effect structure, a movable gate structure is arranged above a gate region in a substrate between a drain and a source. The gate region is covered with a gate oxide. The movable gate structure is created from sili |
| 6592664 |
Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposi |
July 15, 2003 |
| A method for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate is described. The method includes the following steps: a first amount of energy is supplied by heating at least the deposition surface; and an ionized inert gas is con |
| 6555443 |
Method for production of a thin film and a thin-film solar cell, in particular, on a carrier sub |
April 29, 2003 |
| A method for producing a thin film on a carrier substrate. For this purpose, a buried sacrificial layer is initially produced in the interior of a parent body, the buried sacrificial layer separating a layer from a residual body remaining from the parent body. After that, the carrier |
| 6489864 |
Filter for electric signals |
December 3, 2002 |
| A filter for electric signals has a substrate, a vibrating body capable of vibrating with at least two antipodes deflected in phase opposition relative to the substrate and has electrodes connected to a signal input and a signal output for electric excitation and for detection of the |
| 6486665 |
Magnetic field sensor having deformable conductor loop segment |
November 26, 2002 |
| A magnetic field sensor that can be manufactured using the technology of surface micromechanics, having a conductor loop that has at least one deformable segment; a deformation device for deforming the deformable segment of the conductor loop with a predeterminable time dependence; a |
| 6443008 |
Decoupled multi-disk gyroscope |
September 3, 2002 |
| A gyroscope system including multiple rotating or oscillating disks filters out disturbance acceleration inputs such as vibrations or jarring while detecting and measuring external angular velocity. The gyroscope disks are decoupled from a substrate to decrease the impact of external vib |
| 6372656 |
Method of producing a radiation sensor |
April 16, 2002 |
| A method of producing an infrared sensor on a semiconductor substrate involves defining at least one area on the surface of the semiconductor substrate where a recess is to be created in the semiconductor substrate, depositing a membrane on the surface, applying a radiation absorber to t |
| 6369931 |
Method for manufacturing a micromechanical device |
April 9, 2002 |
| A method for manufacturing a micromechanical device, in particular a micromechanical vibrating-mirror device, having the following steps: making available a three-layer structure having a first layer, a second layer and a third layer, the second layer lying between the first and the |
| 6360604 |
Acceleration sensor |
March 26, 2002 |
| An acceleration sensor has an oscillating structure which is movably suspended on a substrate and can be deflected by an acting acceleration. The acceleration sensor also has an analyzing arrangement detecting a deflection of the oscillating structure due to the acceleration. The osc |
| 6217647 |
Method for producing a monocrystalline layer of a conducting or semiconducting material |
April 17, 2001 |
| To produce monocrystalline layers of conducting or semiconducting materials on porous monocrystalline layers of the same material in a reproducible and time-saving manner, a method is provided which involves applying an amorphous layer of the same material to the porous material and conv |
| 6174746 |
Method of producing optical waveguides |
January 16, 2001 |
| A method of producing an optical waveguide, in which a substrate of silicon is etched porously to a defined depth by anodic oxidation in an electrolyte containing hydrofluoric acid. The etched substrate is doped in a suitable dopant liquid containing cations. The doped layer of porous |
| 5996409 |
Acceleration sensing device |
December 7, 1999 |
| An acceleration sensing device includes a rotational speed sensor which is mounted on a substrate and detects rotational speed, at least one oscillating structure with a deflectable seismic mass, and an acceleration sensor that detects linear acceleration and has at least one additional |
