| Patent Number |
Title Of Patent |
Date Issued |
| 7392718 |
Sample temperature adjusting system |
July 1, 2008 |
| Disclosed is a temperature adjusting system for adjusting temperature of a sample, that includes a sample container for containing a sample therein, and a cooling unit for applying a liquid to a surface of the sample container, to cool the sample on the basis of heat of vaporization of t |
| 7391496 |
Exposure apparatus |
June 24, 2008 |
| An exposure apparatus which exposes a substrate to a pattern. The apparatus includes a channel which causes pure water to flow as a coolant, a temperature adjustment unit which adjusts a temperature of the coolant flowing in the channel, and a UV sterilization unit which performs UV |
| 7388307 |
Stage apparatus, plane motor, and device manufacturing method |
June 17, 2008 |
| A stage apparatus includes a movable element including a plurality of magnets, a stage fixed to the movable element, and a stator configured with layers of coils arranged opposite to the magnets with a gap, in which (i) respective layers of coils serve as a plurality of driving axes |
| 7292426 |
Substrate holding system and exposure apparatus using the same |
November 6, 2007 |
| A substrate holding system having a chuck for vacuum attraction and electrostatic attraction of a substrate. The system includes a ring-like rim for carrying a substrate thereon, a plurality of first protrusions disposed inside the rim, for carrying the substrate thereon, and a plura |
| 7284906 |
Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing |
October 23, 2007 |
| An exhaust apparatus for a differential exhaust mechanism having a labyrinth seal and a plurality of vacuum pockets includes a differential exhaust system for evacuating the vacuum pockets and an exhaust system for evacuating a chamber of exhaust gas. The differential exhaust system |
| 7282821 |
Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus |
October 16, 2007 |
| In a linear motor, each arrayed coil unit (160) of a stator yoke (151) is divided into an upper coil (161) and lower coil (162). A cooling pipe (153) is interposed between the upper coil (161) and the lower coil (162). |
| 7282820 |
Stage device and exposure apparatus |
October 16, 2007 |
| An exposure apparatus which aligns a substrate by a stage device for driving a movable element, mounted with a substrate thereon, by using a plane motor. The stage device includes (i) a stator unit having a coil group, and (ii) the movable element, which moves on the stator unit. The |
| 7218020 |
Linear motor, stage apparatus, exposure apparatus, and device manufacturing method |
May 15, 2007 |
| Outflow of heat generated by a linear motor to the outside is suppressed. A linear motor according to the present invention is a linear motor used in a vacuum atmosphere, including a stator, a movable element movable relative to the stator, and a metal film formed on the surface of at |
| 7177007 |
Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus |
February 13, 2007 |
| An exposure apparatus including an illumination optical unit for irradiating exposure light, a stage for mounting a substrate and moving the substrate, a driving unit for driving the stage, a heater for applying heat to the stage, and a heat generation amount control unit for control |
| 7158232 |
Substrate processing apparatus |
January 2, 2007 |
| In order to perform a measurement operation of a pattern and a processing operation in parallel while the positions of two substrate stages are accurately measured and wire/hose units are prevented from becoming tangled, a substrate processing apparatus includes an alignment system f |
| 7154588 |
Alignment apparatus and exposure apparatus |
December 26, 2006 |
| An alignment apparatus includes a first support member having a reference surface which movably supports an object, a driving unit which moves the object in at least one direction on the reference surface and aligns the object at a predetermined position, and a second support member whic |
| 7064804 |
Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus |
June 20, 2006 |
| An exposure apparatus having an illumination optical unit for emitting exposure light, a stage for supporting a substrate, and a main controller for controlling exposure operation of transferring a pattern formed on a master to the substrate. The apparatus includes a controller for c |
| 7057703 |
Exposure apparatus |
June 6, 2006 |
| An exposure apparatus which exposes a substrate to a pattern. The apparatus includes a channel which causes pure water to flow as a coolant, a temperature adjustment unit which adjusts a temperature of the pure water flowing in the channel, and a coolant generation device which gener |
| 7053982 |
Alignment apparatus and exposure apparatus |
May 30, 2006 |
| An alignment apparatus includes a first support member having a reference surface which movably supports an object, and a driving unit which moves the object in at least one direction on the reference surface and aligns the object at a predetermined position. The driving unit includes (i |
| 7038759 |
Exposure apparatus |
May 2, 2006 |
| An exposure apparatus which exposes a substrate to a pattern. The apparatus includes a channel which causes pure water to flow as a coolant, a temperature adjustment unit which adjusts a temperature of the pure water flowing in the channel, and a coolant generation device which gener |
| 7012690 |
Substrate processing apparatus |
March 14, 2006 |
| In order to perform a measurement operation of a pattern and a processing operation in parallel while the positions of two substrate stages are accurately measured and wire/hose units are prevented from becoming tangled, a substrate processing apparatus includes an alignment system f |
| 6982782 |
Processing apparatus for processing object in vessel |
January 3, 2006 |
| An apparatus for processing an object includes a vessel which forms a pressure-reduced inner space and accommodates the object, a member which is supported by an inner side of the vessel through a heat insulator, and a temperature adjusting portion which adjusts a temperature of the |
| 6972499 |
Linear motor, stage apparatus, exposure apparatus, and device manufacturing method |
December 6, 2005 |
| Outflow of heat generated by a linear motor to the outside is suppressed. A linear motor according to the present invention is a linear motor used in a vacuum atmosphere, including a stator, a movable element movable relative to the stator, and a metal film formed on the surface of at le |
| 6954258 |
Positioning apparatus |
October 11, 2005 |
| A positioning apparatus for performing position of a target object in a vacuum atmosphere. The apparatus includes a first structure, a second structure which is movable relative to the first structure and supports the target object, a radiation plate, which is arranged on the first s |
| 6915179 |
PIPE STRUCTURE, ALIGNMENT APPARATUS, ELECTRON BEAM LITHOGRAPHY APPARATUS, EXPOSURE APPARATUS, EX |
July 5, 2005 |
| A pipe structure includes a double pipe having a resin inner pipe and a resin outer pipe covering an outside of the inner pipe, and a discharge mechanism for discharging fluid in a space between the inner pipe and the outer pipe. The double pipe is used in a vacuum chamber having a vacuu |
| 6879382 |
Substrate processing apparatus |
April 12, 2005 |
| In order to perform a measurement operation of a pattern and a processing operation in parallel while the positions of two substrate stages are accurately measured and wire/hose units are prevented from becoming tangled, a substrate processing apparatus includes an alignment system for |
| 6836031 |
Linear motor and exposure apparatus using the same |
December 28, 2004 |
| Some of linear motors which constitute an exposure apparatus have coils each obtained by winding a copper foil wire as a foil-like conductor having an insulating layer around a core member in a multilayered structure. The coil is fixed to a positioning portion serving as the coil fix |
| 6810298 |
Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus |
October 26, 2004 |
| A temperature adjustment apparatus for adjusting a temperature of an object to be temperature-controlled. The apparatus includes a first temperature adjustment mechanism for controlling the temperature of the object to be temperature-controlled, and a second temperature adjustment mechan |
| 6791670 |
Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposu |
September 14, 2004 |
| A linear motor apparatus includes a movable member having a magnet, and a coil wound about the magnet so as to generate a drive force for driving the movable member and having a multi-layer structure formed by winding a foil-like conductor and an insulating layer. The foil-like conductor |
| 6552773 |
Stage system with driving mechanism, and exposure apparatus having the same |
April 22, 2003 |
| An exposure apparatus includes a control device for controlling an operation of the exposure apparatus, a temperature adjusting device for adjusting temperature in a predetermined portion in which temperature is changeable with operation of the exposure apparatus, and a calculator for |
| 6226073 |
Stage system with driving mechanism, and exposure apparatus having the same |
May 1, 2001 |
| A driving system has a driving mechanism for producing a driving force, a drive controlling device for controlling the driving mechanism, and a temperature adjusting mechanism for collecting heat from the driving mechanism, wherein a cooling amount of the temperature adjusting mechanism |
