| Patent Number |
Title Of Patent |
Date Issued |
| 7155919 |
Cryopump temperature control of arrays |
January 2, 2007 |
| An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The controller can control the operation of the heater in response to feedback from temperature sens |
| 6755028 |
Electronically controlled cryopump |
June 29, 2004 |
| In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery mode is on, and the temperature is above the setpoint, a regeneration cycle is started a |
| 6022195 |
Electronically controlled vacuum pump with control module |
February 8, 2000 |
| A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling |
| 5517823 |
Pressure controlled cryopump regeneration method and system |
May 21, 1996 |
| In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a pr |
| 5157928 |
Electronically controlled cryopump |
October 27, 1992 |
| A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and cont |
| 4918930 |
Electronically controlled cryopump |
April 24, 1990 |
| A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and cont |
| 4655046 |
Cryopump with exhaust filter |
April 7, 1987 |
| An exhaust port from a cryopump vacuum vessel leads to an exhaust valve. The valve is protected from contamination by a filter standpipe which extends from the exhaust port into the vacuum vessel and which is open at its end opposite to the exhaust port. The standpipe is of porous materi |
| 4577465 |
Oil free vacuum system |
March 25, 1986 |
| An oil free vacuum system 10 which comprises a high thermal capacitance cryopump 12 and air ejector 38. The air ejector 38 is used to reduce load lock chamber 16 pressure to an intermediate vacuum. Cryopump 12 further evacuates chamber 12 to the operating vacuum of a work chamber 14. The |
| 4546613 |
Cryopump with rapid cooldown and increased pressure |
October 15, 1985 |
| In a cryopump, condensation of gases such as argon, oxygen and nitrogen on surfaces other than the second stage array 38, 40 is avoided to prevent cross over hang up and pressure instability. To prevent condensation of argon, oxygen and nitrogen on the frontal cryopumping array 46, that |
