| Patent Number |
Title Of Patent |
Date Issued |
| 5132652 |
Highpower microwave transmissive window assembly |
July 21, 1992 |
| A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to |
| 5126635 |
Microwave plasma operation using a high power microwave transmissive window assembly |
June 30, 1992 |
| A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to |
| 4937094 |
Method of creating a high flux of activated species for reaction with a remotely located substra |
June 26, 1990 |
| A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exit |
| 4931756 |
High power microwave transmissive window assembly |
June 5, 1990 |
| A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to |
| 4883686 |
Method for the high rate plasma deposition of high quality material |
November 28, 1989 |
| A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exit |
