| Patent Number |
Title Of Patent |
Date Issued |
| 7354649 |
Semiconductor workpiece |
April 8, 2008 |
| The present invention provides an apparatus and method for use in processing semiconductor workpieces. The new apparatus and method allows for the production of thinner workpieces that at the same time remain strong. Particularly, a chuck is provided that includes a body, a retainer |
| 7288489 |
Process for thinning a semiconductor workpiece |
October 30, 2007 |
| The present invention provides an apparatus and method for use in processing semiconductor workpieces. The new apparatus and method allows for the production of thinner workpieces that at the same time remain strong. Particularly, a chuck is provided that includes a body, a retainer |
| 7193295 |
Process and apparatus for thinning a semiconductor workpiece |
March 20, 2007 |
| The present invention provides system and apparatus for use in processing wafers. The new system and apparatus allows for the production of thinner wafers that at same time remain strong. As a result, the wafers produced by the present process are less susceptible to breaking. The unique |
| 6799932 |
Semiconductor wafer processing apparatus |
October 5, 2004 |
| A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean processing chamber and at least one processing station disposed in the processing chamber. An |
| 6736148 |
Automated semiconductor processing system |
May 18, 2004 |
| An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process b |
| 6652219 |
Semiconductor wafer processing apparatus having improved wafer input/output handling system |
November 25, 2003 |
| A processor for processing articles, such as semiconductor wafers, includes an enclosure defining a substantially enclosed clean processing chamber and at least one processing station disposed in the processing chamber. An interface section is disposed adjacent an interface end of the en |
| 6599075 |
Semiconductor wafer processing apparatus |
July 29, 2003 |
| A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean processing chamber and at least one processing station disposed in the processing chamber. An |
| 6447232 |
Semiconductor wafer processing apparatus having improved wafer input/output handling system |
September 10, 2002 |
| A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean processing chamber and at least one processing station disposed in the processing chamber. An |
| 6273110 |
Automated semiconductor processing system |
August 14, 2001 |
| An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process b |
