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You-Neng Cheng Patents |
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Inventor: Cheng; You-Neng
Address: Taipei, TW
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6379574 |
Integrated post-etch treatment for a dielectric etch process |
April 30, 2002 |
| The present disclosure pertains to an integrated post-etch treatment method which is performed after a dielectric etch process. Using the method of the invention, byproducts formed on the sidewalls of contact vias during the dielectric etch process can be removed efficiently. The method |
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