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Mark R. Breen Patents |
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Inventor: Breen; Mark R.
Address: Austin, TX
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6473174 |
Resist removal monitoring by raman spectroscopy |
October 29, 2002 |
| Various methods of inspecting a workpiece for residue are provided. In one aspect, a method of inspecting a workpiece for carbon residue includes directing coherent radiation at the workpiece to produce Rayleigh scattered radiation and Raman scattered radiation. The Rayleigh scattered |
| 5508228 |
Compliant electrically connective bumps for an adhesive flip chip integrated circuit device and |
April 16, 1996 |
| Compliant electrically connection bumps for an adhesive flip chip integrated circuit device and various methods for forming the bumps include the steps of forming polymer bumps on a substrate or an integrated circuit die and coating the polymer bumps with a metallization layer. The p |
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