| Patent Number |
Title Of Patent |
Date Issued |
| 7370764 |
Transport module |
May 13, 2008 |
| A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting w |
| 6736268 |
Transport module |
May 18, 2004 |
| A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting wafer |
| 6550619 |
Shock resistant variable load tolerant wafer shipper |
April 22, 2003 |
| A wafer shipper for stacked wafers provides significantly improved resistance to shock and impact as well as flexibility and tolerance in wafer capacities and guidance in optimal amount of packing material. The shipper has a base and a top cover both of which have a nominal wall that |
| 6520338 |
Wafer carrier having a low tolerance build-up |
February 18, 2003 |
| A low tolerance build-up wafer carrier and method for assembling the same for supporting semiconductor wafer disks and for interfacing with processing equipment. Press-fit fasteners are used to assemble composite carriers and attach equipment interface portions to the carrier. Each p |
| 6267245 |
Cushioned wafer container |
July 31, 2001 |
| A wafer container comprising a receptacle and door provides for horizontal minimal contact support of wafers and provides for vertical support without one surface support intermediate the front edge support and rear edge support. The wafer carrier has for each wafer two distinct levels o |
| 6216874 |
Wafer carrier having a low tolerance build-up |
April 17, 2001 |
| A low tolerance build-up wafer carrier and method for assembling the same for supporting semiconductor wafer disks and for interfacing with processing equipment. Press-fit fasteners are used to assemble composite carriers and attach equipment interface portions to the carrier. Each p |
| 6010008 |
Transport module |
January 4, 2000 |
| A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that |
