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Grit Bonsdorf Patents |
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Inventor: Bonsdorf; Grit
Address: Dresden, DE
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7157381 |
Method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated cir |
January 2, 2007 |
| A method for providing whisker-free aluminum metal lines or aluminum alloy lines in integrated circuits includes the following steps: providing a substrate; providing a whisker-containing layer made of aluminum metal or an aluminum alloy on the substrate; back-etching and/or resputtering |
| 6833324 |
Process and device for cleaning a semiconductor wafer |
December 21, 2004 |
| A surface of a semiconductor wafer is cleaned following a chemical mechanical polishing process. With the semiconductor wafer rotating continuously, an integrated process sequence is used to etch the surface, rinse the surface, and they dry the surface. The apparatus for cleaning the |
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