| Patent Number |
Title Of Patent |
Date Issued |
| 7410340 |
Direct tool loading |
August 12, 2008 |
| The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adap |
| 7293950 |
Universal modular wafer transport system |
November 13, 2007 |
| The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolat |
| 7293811 |
Ultra low contact area end effector |
November 13, 2007 |
| The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the suppo |
| 7290813 |
Active edge grip rest pad |
November 6, 2007 |
| The present invention comprises a distal rest pad for supporting a portion of a wafer seated on an end effector. In one embodiment, the rest pad includes a bottom support pad and an edge stop. Each element is mounted separately to the distal end of a support plate. The bottom support pad |
| 7217076 |
Semiconductor material handling system |
May 15, 2007 |
| The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount |
| 7100340 |
Unified frame for semiconductor material handling system |
September 5, 2006 |
| The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying th |
| 7066707 |
Wafer engine |
June 27, 2006 |
| An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, |
| 7055875 |
Ultra low contact area end effector |
June 6, 2006 |
| The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the suppo |
| 6704998 |
Port door removal and wafer handling robotic system |
March 16, 2004 |
| An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient location within the I/O minienvironment. After wafer processing has been completed and the wa |
| 6663148 |
System for preventing improper insertion of FOUP door into FOUP |
December 16, 2003 |
| An apparatus for preventing improper engagement of a pod door and a pod. Specifically, misalignment of at least one latch finger connected t the pod door with latch engagement slots in the pod prevents a pod door from mechanically engaging a pod. |
| 6634851 |
Workpiece handling robot |
October 21, 2003 |
| A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of |
| 6623051 |
Laterally floating latch hub assembly |
September 23, 2003 |
| A laterally floating latch hub assembly includes a latch key receptor translatably mounted within a rotatable latch actuation cam. Latch keys within a port door are received within the latch key receptor, which is capable of translating laterally to ensure a proper fit of the latch key |
| 6612797 |
Cassette buffering within a minienvironment |
September 2, 2003 |
| A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate circumjacent thereabout, and a minienvironment mounted to port plate. The SMIF interface and/or |
| 6579052 |
SMIF pod storage, delivery and retrieval system |
June 17, 2003 |
| A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-s |
| 6575687 |
Wafer transport system |
June 10, 2003 |
| A wafer transport mechanism is disclosed capable of transferring workpiece cassettes between lot boxes and SMIF pods. The transport mechanism includes a frame having a first support platform on a first side of the frame for supporting a SMIF pod, and a second support platform on a second |
| 6533101 |
Integrated transport carrier and conveyor system |
March 18, 2003 |
| A system for transporting articles. The transport system includes a conveyor system which includes a transport carrier for carrying one or more articles between workstations and a drive rail and a support rail for supporting the transport carrier. The drive rail includes a drive system |
| 6494308 |
Integrated roller transport pod and asynchronous conveyor |
December 17, 2002 |
| A system for transporting articles. The transport system includes a conveyor system which includes a transport device for carrying articles between workstations and a drive rail and a support rail for supporting the transport device. The drive rail includes a drive system for propell |
| 6481558 |
Integrated load port-conveyor transfer system |
November 19, 2002 |
| A transfer system and method for moving an article between a conveyor and a workstation. The transfer system includes an elevator system having a lift device configured to engage the article carried by a conveyor and raise the article above the conveyor. The lift device is movable betwee |
| 6468021 |
Integrated intra-bay transfer, storage, and delivery system |
October 22, 2002 |
| An integrated intra-bay transfer, storage and delivery system is provided for moving an article between a conveyor and a station such as a work station. The system includes a transfer assembly which includes a lift mechanism and a displacement mechanism. The transfer assembly transfers |
| 6435330 |
In/out load port transfer mechanism |
August 20, 2002 |
| A transfer system for moving one or more articles between a conveyor and a station. The system includes a transfer assembly having a lifting mechanism configured to engage the article as it is carried by the conveyor, lift the article to a raised position above the support and lower |
| 6398032 |
SMIF pod including independently supported wafer cassette |
June 4, 2002 |
| A SMIF pod capable of supporting a cassette at points in the pod located directly over or near a kinematic coupling between the pod and a surface on which the pod is supported. Even if the pod shell warps or otherwise deforms, the three points of contact between the pod and the support |
| 6364595 |
Reticle transfer system |
April 2, 2002 |
| A reticle transfer system is disclosed for transferring reticles between a reticle-carrying SMIF container and a process tool. The reticle transfer system according to the present invention includes an arm assembly having a transfer arm and a gripping mechanism affixed to the end of the |
| 6318953 |
SMIF-compatible open cassette enclosure |
November 20, 2001 |
| An ergonomic loading assembly for an I/O port onto which a bare cassette may be easily loaded and unloaded. The loading assembly further provides isolation between the operator and the I/O port after loading of a cassette to minimize safety risks and to minimize the amount of particu |
| 6308818 |
Transport system with integrated transport carrier and directors |
October 30, 2001 |
| A director assembly for selectively directing a transport carrier from one conveyor path portion to another. The director assembly having a pair of spaced director rails positioned below and in between drive and support rails of the conveyor. The pair of spaced director rails can be |
| 6298280 |
Method for in-cassette wafer center determination |
October 2, 2001 |
| A system for positioning an end effector of a wafer handling robot with respect to a wafer to be extracted from a cassette, and for thereafter reading an indicial mark on the wafer. The system includes a pair of sensor units fixedly mounted on the end effector, which sensor units are |
| 6223886 |
Integrated roller transport pod and asynchronous conveyor |
May 1, 2001 |
| A system for transporting articles. The transport system includes a conveyor system which includes a transport device for carrying articles between workstations and a drive rail and a support rail for supporting the transport device. The drive rail includes a drive system for propell |
| 6220808 |
Ergonomic, variable size, bottom opening system compatible with a vertical interface |
April 24, 2001 |
| A system is described herein including a load port which allows various pod sizes, including 200 mm and 300 mm, add various configurations, including front opening and bottom opening, to operate with a BOLTS interface, or simply with a vertical port on the front end of a process tool in |
| 6188323 |
Wafer mapping system |
February 13, 2001 |
| A wafer mapping system is disclosed mounted to the port door of a process tool. As the port door is lowered away from the access port of the process tool in order to allow wafer transfer through the port, the wafer mapping system according to the present invention detects the presence an |
| 6138721 |
Tilt and go load port interface alignment system |
October 31, 2000 |
| A tilt and go assembly included as part of a load port interface assembly is disclosed for providing quick and easy attachment and adjustment of the load port interface assembly to a BOLTS interface. When a load port interface assembly according to the present invention is positioned |
| 6135698 |
Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications |
October 24, 2000 |
| A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus includes a port plate having a central opening, and a port door fitting within and seali |
| 5988233 |
Evacuation-driven SMIF pod purge system |
November 23, 1999 |
| A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes seals at the interfaces between the gas inlet and removal lines to substantially preve |
| 5944475 |
Rotated, orthogonal load compatible front-opening interface |
August 31, 1999 |
| A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and |
| 5931631 |
Method and apparatus for vertical transfer of a semiconductor wafer cassette |
August 3, 1999 |
| A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the |
| 5895191 |
Sealable, transportable container adapted for horizontal loading and unloading |
April 20, 1999 |
| A transportable container for storing and carrying articles such as semiconductor wafers or flat panel display substrates which is adapted for horizontal loading and unloading. The container includes a box and a box door. The box door can be sealably attached to the box to isolate the |
| 5846338 |
Method for dry cleaning clean room containers |
December 8, 1998 |
| A method and apparatus for dry cleaning a semiconductor wafer storage and transport pod. After the pod is located with respect to the cleaning chamber and opened to expose the interior surfaces of the pod to the cleaning chamber, the pod is conditioned in preparation for the cleaning |
| 5810062 |
Two stage valve for charging and/or vacuum relief of pods |
September 22, 1998 |
| A valve mounted in pod door of a SMIF pod for allowing gas flow to and from the sealed pod while the pod is seated on a SMIF port. The valve is provided to allow fluid flow to or from the pod upon the valve be actuated by either a standard registration pin or a specially adapted fluid fl |
| 5788458 |
Method and apparatus for vertical transfer of a semiconductor wafer cassette |
August 4, 1998 |
| A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the |
| 5740845 |
Sealable, transportable container having a breather assembly |
April 21, 1998 |
| A transportable, sealable container, for example a SMIF pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. The two sealing surfaces form a seal when the box door is moved in a sealing position with respect to the box. A l |
| 5653565 |
SMIF port interface adaptor |
August 5, 1997 |
| An adaptor plate for allowing 200 mm SMIF pods carrying one or more semiconductor wafers to be used on an access port of a wafer processing station configured to accept a 300 mm SMIF pod. The adaptor plate has a substantially circular outer circumference conforming substantially in s |
| 5611452 |
Sealable transportable container having improved liner |
March 18, 1997 |
| A transportable, sealable container, for example a Standard Mechanical Interface (or SMIF) pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. A liner, preferably stainless steel, is attached to the inside surface of the b |
| 5586585 |
Direct loadlock interface |
December 24, 1996 |
| A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber includes mechanisms for separating a wafer-carrying cassette from the storage and transfer pod, |
| 5570990 |
Human guided mobile loader stocker |
November 5, 1996 |
| A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a |
| 5547328 |
Method and apparatus for transferring articles between two controlled environments |
August 20, 1996 |
| A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cove |
| 5469963 |
Sealable transportable container having improved liner |
November 28, 1995 |
| A transportable, sealable container, which has an improved pod liner. The container includes a box, a box door, and a gasket which forms a seal between the box and the box door. The box door has a conductive liner and a conductive path from the conductive liner to ground potential for |
| 5370491 |
Method and apparatus for transferring articles between two controlled environments |
December 6, 1994 |
| A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cove |
| 5169272 |
Method and apparatus for transferring articles between two controlled environments |
December 8, 1992 |
| A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cove |
| 5166884 |
Intelligent system for processing and storing articles |
November 24, 1992 |
| A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memo |
| 5097421 |
Intelligent waxer carrier |
March 17, 1992 |
| Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data |
| 4995430 |
Sealable transportable container having improved latch mechanism |
February 26, 1991 |
| A transportable, sealable container, for example a SMIF pod, has a box and a box door. The box has a first sealing surface and the box door has a second sealing surface which forms a seal with the first sealing surface when the box door is moved in a sealing direction with respect to the |
| 4974166 |
Processing systems with intelligent article tracking |
November 27, 1990 |
| A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, |
