| Patent Number |
Title Of Patent |
Date Issued |
| 7382815 |
Laser spectral engineering for lithographic process |
June 3, 2008 |
| An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a des |
| 7298770 |
Laser spectral engineering for lithographic process |
November 20, 2007 |
| An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a des |
| 7139301 |
Laser spectral engineering for lithographic process |
November 21, 2006 |
| An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a des |
| 6882674 |
Four KHz gas discharge laser system |
April 19, 2005 |
| The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated cir |
| 6853653 |
Laser spectral engineering for lithographic process |
February 8, 2005 |
| An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a des |
| 6757316 |
Four KHz gas discharge laser |
June 29, 2004 |
| The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated cir |
| 6721340 |
Bandwidth control technique for a laser |
April 13, 2004 |
| A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment |
| 6671294 |
Laser spectral engineering for lithographic process |
December 30, 2003 |
| An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a des |
| 6650666 |
Laser wavelength control unit with piezoelectric driver |
November 18, 2003 |
| An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on |
| 6532247 |
Laser wavelength control unit with piezoelectric driver |
March 11, 2003 |
| An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on |
| 6529531 |
Fast wavelength correction technique for a laser |
March 4, 2003 |
| Electric discharge laser with fast chirp correction. Fast wavelength chirp correction equipment includes at least one piezoelectric drive and a fast wavelength detection means and has a feedback response time of less than 1.0 millisecond. In a preferred embodiment a simple learning algor |
| 6496528 |
Line narrowing unit with flexural grating mount |
December 17, 2002 |
| A grating based line narrowing device for line narrowing lasers producing high energy laser beams. Techniques are provided for minimizing adverse effects of heat produced by the laser beam inside the line narrowing device.A flexural grating mount is provided which virtually eliminates st |
| 6192064 |
Narrow band laser with fine wavelength control |
February 20, 2001 |
| A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an R.sub.MAX mirror in a line nar |
