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Francy Abraham Patents |
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Inventor: Abraham; Francy
Address: Singapore, SG
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7340087 |
Edge inspection |
March 4, 2008 |
| A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge o |
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