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Joseph V. Abernathy Patents |
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Inventor: Abernathy; Joseph V.
Address: Wylie, TX
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4872938 |
Processing apparatus |
October 10, 1989 |
| A process module which is compatible with a system using vacuum wafer transport in which wafers are generally transported and processed in a face down position under vacuum, and which also includes an additional wafer movement, wherein, after a wafer has been emplaced face down, in a |
| 4836905 |
Processing apparatus |
June 6, 1989 |
| A processing apparatus and method which permits sputter deposition and which is compatible with a vacuum processing system wherein the wafers are largely transferred and processed in the face down position. This includes an additional wafer movement, wherein, after a wafer has been empla |
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