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Joe V. Abernathy Patents
Inventor:
Abernathy; Joe V.
Address:
Wylie, TX
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
4875989 Wafer processing apparatus October 24, 1989
A processing apparatus and method for edge-preferential processing of partially fabricated integrated circuit wafers or of other substantially flat and thin workpieces. A plasma remote from the workpiece is used to generate activated species, and a baffle which is in proximity to the


 
 
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