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Joe V. Abernathy Patents |
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Inventor: Abernathy; Joe V.
Address: Wylie, TX
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4875989 |
Wafer processing apparatus |
October 24, 1989 |
| A processing apparatus and method for edge-preferential processing of partially fabricated integrated circuit wafers or of other substantially flat and thin workpieces. A plasma remote from the workpiece is used to generate activated species, and a baffle which is in proximity to the |
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