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Amr Y. Abdo Patents
Inventor:
Abdo; Amr Y.
Address:
Madison, WI
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7014966 Method and apparatus for elimination of bubbles in immersion medium in immersion lithography sys March 21, 2006
A method of operating an immersion lithography system, including steps of immersing at least a portion of a wafer to be exposed in an immersion medium, wherein the immersion medium comprises at least one bubble; directing an ultrasonic wave through at least a portion of the immersion


 
 
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