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Martin Peter Aalund Patents |
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Inventor: Aalund; Martin Peter
Address: San Francisco, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6116848 |
Apparatus and method for high-speed transfer and centering of wafer substrates |
September 12, 2000 |
| An apparatus for centering and gripping semiconductor wafers. A solenoid is used to actuate two or three curved contacts. Power to the solenoid, and position information from the solenoid is transmitted along a pair of wires. To center the wafer, the solenoid is actuated and the contacts |
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