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Martin P. Aalund Patents |
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Inventor: Aalund; Martin P.
Address: Mountain View, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6520726 |
Apparatus and method for using a robot to remove a substrate carrier door |
February 18, 2003 |
| A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the chamber. A drive mechanism is connected to the robot. A door interface mechanism is attached to |
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