| Patent Number |
Title Of Patent |
Date Issued |
| 7079565 |
Systems and methods utilizing laser discharge electrodes with ceramic spoilers |
July 18, 2006 |
| Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoil |
| 6856638 |
Resonator arrangement for bandwidth control |
February 15, 2005 |
| A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, a |
| 6792023 |
Method and apparatus for reduction of spectral fluctuations |
September 14, 2004 |
| An excimer or molecular fluorine laser system includes a laser chamber filled with a gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes, including a pair of main discharge electrodes and at least one preionization electrode, within the laser |
| 6760358 |
Line-narrowing optics module having improved mechanical performance |
July 6, 2004 |
| An apparatus for adjusting an orientation of an optical component mounted within a laser resonator with suppressed hysteresis includes an electromechanical device, a drive element, and a mechano-optical device coupled to the mounted optical component. The drive element is configured |
