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Inventor:
van der Mast; Karel D.
Address:
Helmond, NL
No. of patents:
2
Patents:












Patent Number Title Of Patent Date Issued
6365896 Environmental SEM with a magnetic field for improved secondary electron direction April 2, 2002
The current of secondary electrons emanating from the specimen 14 in an ESEM is amplified by an avalanche-like ionization of the molecules 41 of the gas atmosphere. However, in order to achieve an adequate number of successive ionizations, a comparatively high voltage is required at the
6184525 Environmental SEM with a multiple fields for improved secondary electron detection February 6, 2001
Amplification of the current of secondary electrons emanating from the specimen 14 is realized in an ESEM by avalanche-like ionization of the molecules 41 of the gas atmosphere. However, in order to achieve an adequate number of successive ionizations, a comparatively high value of t










 
 
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