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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
de Geus; Richard
Address:
Cupertino, CA
No. of patents:
5
Patents:












Patent Number Title Of Patent Date Issued
5938884 Apparatus for chemical mechanical polishing August 17, 1999
A method and apparatus is disclosed for polishing the face of a semiconductor wafer. The wafer is held in position by a tooling head and is contacted by an abrasive pad. A table is provided on to which the abrasive pad is fixedly attached, both of which move in directions parallel to
5908530 Apparatus for chemical mechanical polishing June 1, 1999
An apparatus for polishing wafers, preferably by chemical mechanical polishing. The apparatus includes a table defining a planar polishing surface adapted to contain a polishing medium and a wafer carrier assembly adapted to hold a wafer against the polishing surface. The wafer carrier
5759918 Method for chemical mechanical polishing June 2, 1998
A method and apparatus is disclosed for polishing the face of a semiconductor wafer. The wafer is held in position by a tooling head and is contacted by an abrasive pad. A table is provided on to which the abrasive pad is fixedly attached, both of which move in directions parallel to
5337144 Etch rate monitor using collimated light and method of using same August 9, 1994
An etch rate monitor for use with semiconductor wafer etching processes includes a source of light of normal incidence to the wafer surface through a window in the etching chamber. In a first embodiment, a Fresnel or positive lens is used to collect some of the diffraction orders caused
4595221 Disc transfer device June 17, 1986
A disc transfer device for the manipulation of hard discs without damage to the recording surfaces thereof. The device is manually operated and consists of a U-shaped handle adapted for fitting over a disc storage spindle. The handle includes two grippers made of a rigid and smooth yet










 
 
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