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Zolfagharkhani; Guiti
Brighton, MA
No. of patents:

Patent Number Title Of Patent Date Issued
8587183 Microelectromechanical systems (MEMS) resonators and related apparatus and methods November 19, 2013
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such
8174170 Methods and apparatus for mechanical resonating structures May 8, 2012
Mechanical resonating structures and related methods are described. The mechanical resonating structures may provide improved efficiency over conventional resonating structures. Some of the structures have lengths and widths and are designed to vibrate in a direction approximately pa
8058769 Mechanical resonating structures including a temperature compensation structure November 15, 2011
Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.

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