Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Zhou; Jie
Address:
Sunnyvale, CA
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
8133819 Plasma etching carbonaceous layers with sulfur-based etchants March 13, 2012
Etching of carbonaceous layers with an etchant gas mixture including molecular oxygen (O.sub.2) and a gas including a carbon sulfur terminal ligand. A high RF frequency source is employed in certain embodiments to achieve a high etch rate with high selectivity to inorganic dielectric










 
 
  Recently Added Patents
Mobile tablet information handling system support
Lighting elements
Active pulse blood constituent monitoring
System and method for judging success or failure of work of robot
Memory device and method for dynamic random access memory having serial interface and integral instruction buffer
Organic EL display device and method for manufacturing the same
Method and system of channel detecting and reporting, terminal, and management center
  Randomly Featured Patents
Well treatment device, method, and system
Sleep state classification
Methods for suppressing the binding of detectable probes to non-target sequences in hybridization assays
Method of salicide formation by siliciding a gate area prior to siliciding a source and drain area
Tool tray
Low eddy current cryogen circuit for superconducting magnets
Apparatus for continuously manufacturing boards
Electronic computer
Writing instrument
Disposable process device