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Inventor: Zaal; Koen Jacobus Johannes Marie
Address: Eindhoven, NL
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7145269 |
Lithographic apparatus, Lorentz actuator, and device manufacturing method |
December 5, 2006 |
| A lithographic apparatus comprising a highly effective Lorentz actuator, is presented. The Lorentz actuator comprises a main magnet system and a subsidiary magnet system arranged in Halbach configuration, an electrically conductive element for producing a force via the interaction of |
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