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Inventor: Zaal; Koen Jacobus Johannes Maria
Address: Eindoven, NL
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7411657 |
Lithographic apparatus and device manufacturing method |
August 12, 2008 |
| A lithographic apparatus may include an optical element, such as an immersion fluid reservoir, which supported at least in part by a bearing, such as a gas bearing. To enable illumination by the lithographic apparatus of an edge of the substrate, a surrounding structure is provided t |
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