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Inventor: Zaal; Koen J J M
Address: Eindhoven, NL
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7012264 |
Lithographic apparatus and device manufacturing method |
March 14, 2006 |
| A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving t |
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