| |
 |
|
|
Inventor: Yunogami; Takashi
Address: Kokubunji, JP
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5284544 |
Apparatus for and method of surface treatment for microelectronic devices |
February 8, 1994 |
| An apparatus for surface treatment according to the present invention used for carrying out dry etching, thin film deposition and so forth is provided with a neutral beam etching apparatus in order to improve etching rate. In an embodiment, microwave wave-guides forming a duplex tube, a |
| 5241186 |
Surface treatment method and apparatus therefor |
August 31, 1993 |
| A method of preventing damages of a semiconductor having an insulator film at its surface caused by holes induced in the insulator film and move to and are trapped at or near the interface between the insulator film and a substrate upon applying surface treatment for the surface of the |
| 5115130 |
Surface measuring method and apparatus |
May 19, 1992 |
| A surface measuring method and apparatus utilizes a low energy neutral particle (neutral atom, neutral molecule) controlled to be equal to or lower than 1 eV, which is caused to collide against the surface of a specimen. A neutral particle reflected at the specimen surface is detecte |
|
|
|
