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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Yoshitake; Shusuke
Address:
Kanagawa, JP
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7554107 Writing method and writing apparatus of charged particle beam, positional deviation measuring me June 30, 2009
A charged particle beam writing method includes measuring a topography of a backside of a substrate without an influence of a gravity sag, calculating a first positional deviation amount of a pattern written on a frontside of the substrate in a case of the backside of the substrate h


 
 
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