Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Yoshioka; Ken
Address:
Kudamatsu, JP
No. of patents:
5
Patents:












Patent Number Title Of Patent Date Issued
6309980 Semiconductor integrated circuit arrangement fabrication method October 30, 2001
To realize etching with a high selection ratio and a high accuracy in fabrication of an LSI, the composition of dissociated species of a reaction gas is accurately controlled when dry-etching a thin film on a semiconductor substrate by causing an inert gas excited to a metastable sta
6245202 Plasma treatment device June 12, 2001
In a high-frequency inductive plasma etching apparatus, a space between an antenna to which a high-frequency power is fed and a processing chamber is insulated with an insulating material having a suitable thickness, while the antenna is protected from a plasma or a reactive gas for plas
6074958 Semiconductor integrated circuit arrangement fabrication method June 13, 2000
To realize etching with a high selection ratio and a high accuracy in fabrication of an LSI, the composition of dissociated species of a reaction gas is accurately controlled when dry-etching a thin film on a semiconductor substrate by causing an inert gas excited to a metastable sta
5962347 Semiconductor integrated circuit arrangement fabrication method October 5, 1999
To realize etching with a high selection ratio and a high accuracy in fabrication of an LSI, the composition of dissociated species of a reaction gas is accurately controlled when dry-etching a thin film on a semiconductor substrate by causing an inert gas excited to a metastable sta
5874013 Semiconductor integrated circuit arrangement fabrication method February 23, 1999
To realize etching with a high selection ratio and a high accuracy in fabrication of an LSI, the composition of dissociated species of a reaction gas is accurately controlled when dry-etching a thin film on a semiconductor substrate by causing an inert gas excited to a metastable sta










 
 
  Recently Added Patents
Aisle barrier
Solid-state imaging device and imaging apparatus
Multi-band dipole antenna
Light fixture
Wafer recycling method
Soybean cultivar BY0811143
Architectural panel with millet and grass
  Randomly Featured Patents
Inplace gasket belling machine
Millimeter wave adjustable cavity package
Fish finder
Light emitting diode and method of fabricating the same
Network correction security system and method
Process for the preparation of a catalyst for the synthesis of methane
Heated mascara applicator and suitable compositions
Plated structures or components
Magnetic random access memory element
Pole mounted lighting system