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Inventor:
Yoshikawa; Shoji
Address:
Hachioji, JP
No. of patents:
18
Patents:












Patent Number Title Of Patent Date Issued
7599052 Method for marking defect and device therefor October 6, 2009
A defect marking device includes a flaw inspection device which has a plurality of light-receiving parts that identify reflected lights coming from an inspection plane of a metal strip under two or more of optical conditions different from each other; a signal processing section that
7479634 Electron beam apparatus and device manufacturing method using the same January 20, 2009
An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample, such as a wafer, formed with a pattern with an electron beam to evaluate the sample comprises
7423744 Method for marking defect and device therefor September 9, 2008
A defect marking device includes a flaw inspection device which has a plurality of light-receiving parts that identify reflected lights coming from an inspection plane of a metal strip under two or more of optical conditions different from each other; a signal processing section that
7411191 Inspection system by charged particle beam and method of manufacturing devices using the system August 12, 2008
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the elec
7408175 Apparatus for inspection with electron beam, method for operating same, and method for manufactu August 5, 2008
A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate "S" to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving
7403279 Information recording medium examining apparatus and method July 22, 2008
In an examining apparatus, an electron gun irradiates an intended position of an information recording medium with an electron beam. A stage holds the information recording medium such that the information recording medium can be moved along a rotation direction and a radial direction. A
7365324 Testing apparatus using charged particles and device manufacturing method using the testing appa April 29, 2008
A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25.cndot.1, then forms an image und
7351969 Electron beam inspection system and inspection method and method of manufacturing devices using April 1, 2008
An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary ele
7248366 Method for marking defect and device therefor July 24, 2007
The defect marking method comprises the steps of: installing a surface defect tester to detect surface flaw and a marker device to apply marking at defect position, in a continuous processing line of steel sheet; detecting the surface flaw on the steel sheet using the surface defect
5109367 Optical information recording and reproducing apparatus performing focus and/or track control by April 28, 1992
For an output signal of an error signal generating circuit generating a focus error signal and/or track error signal, it is materialized that a highly precise servo system can sufficiently deal with the case in which the change of the light intensity by switching recording and reproducin
5048002 Photodisc apparatus with means for canceling offset of tracking servo loop September 10, 1991
A servo tracking system enables a beam spot formed on a photodisc through an objective lens to trace a track on the disc. After opening the tracking servo loop, a drive signal is supplied to a lens actuator so as to move the objective lens across the tracks thereby generating a tracking
5014256 Photodisc apparatus with gain control of tracking servo loop May 7, 1991
A gain control device for controlling the loop gain of a servo tracking system which enables a beam spot formed on a photodisc through an objective lens to trace a track on the disc. The gain control device opens the tracking servo loop and applied a drive signal to a lens actuator so
4797866 Optical recording/reproducing apparatus January 10, 1989
A light beam for recording, reproducing, and erasing information is divided by a half mirror into a transmitted light beam directed to a recording medium and a light beam for detecting a position of a reflected movable optical pickup. Since no additional light source is necessary for
4764911 Optical lens vibration control for optical information recording and/or reproducing apparatus August 16, 1988
An optical information recording and/or reproducing apparatus is provided with a finely moving device. The movement of an optical device converging and radiating a light beam onto an optical information recording medium, is controlled to be able to finely move the position of a spot ligh
4706232 Optical recording and reproducing apparatus November 10, 1987
The optical recording and reproducing apparatus comprises a magnetic field applying section, a movable mechanism for moving the magnetic field applying section, a distance detecting section for detecting a distance between magnetic poles of the magnetic field applying section and the
4692606 Modulated light source with power stabilized according to data signal September 8, 1987
An optical power stabilizing device for use in information recording and reproducing apparatus is disclosed. The device comprises a light source for generating light power in accordance with input signals, a photodetecting means coupled to the light source for detecting at least a pa
4651314 Optical recording and reproducing equipment March 17, 1987
The light beam from a semiconductor laser that generates laser light for recording or reproducing is irradiated onto a disk through an objective lens and the light reflected from the disk is received by a four quadrant light detector with four light receiving areas. Based on the light
4464050 Apparatus for detecting optically defects August 7, 1984
An apparatus for detecting optically defects in object such as original glass disc for use in manufacturing video and audio discs by projecting a laser light flux onto the object includes an objective lens for focussing the incident laser light flux onto the object as a small light spot,










 
 
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