| Patent Number |
Title Of Patent |
Date Issued |
| 6928720 |
Method of manufacturing a surface acoustic wave device |
August 16, 2005 |
| A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of .alpha.-tantalum. |
| 6911881 |
Surface acoustic wave device |
June 28, 2005 |
| A surface acoustic wave device has first and second surface acoustic wave filter elements which are arranged on a surface acoustic wave substrate so as to define a filter device having a two-stage configuration. A free surface portion is provided by forming a perforation in an inter-stag |
| 6826815 |
Method for manufacturing a surface acoustic wave device |
December 7, 2004 |
| A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and cont |
| 6810566 |
Method of manufacturing a surface acoustic wave element |
November 2, 2004 |
| A method of manufacturing a surface acoustic wave element includes the steps of providing a piezoelectric body having an interdigital transducer, where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of th |
| 6789297 |
Method of manufacturing a surface acoustic wave element |
September 14, 2004 |
| A method of manufacturing a surface acoustic wave element includes the steps of providing a piezoelectric body having an interdigital transducer, where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of th |
| 6625855 |
Method for producing surface acoustic wave device |
September 30, 2003 |
| A method for producing a surface acoustic wave device, includes the steps of preparing a piezoelectric substrate, forming a thin film electrode on the piezoelectric substrate, etching the thin film electrode for forming an IDT, trimming at least one of the piezoelectric substrate and the |
| 6564439 |
Method and manufacturing a surface acoustic wave element |
May 20, 2003 |
| A method of manufacturing a surface acoustic wave element includes the steps of providing a piezoelectric body having an interdigital transducer, where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of th |
| 6483224 |
Surface acoustic wave device and method of producing the same |
November 19, 2002 |
| A surface acoustic wave device includes a piezoelectric substrate and at least one interdigital electrode disposed on the piezoelectric substrate. The interdigital electrode is made of .alpha.-tantalum. |
| 6437668 |
Surface acoustic wave resonator, surface acoustic wave device, and communication device using sh |
August 20, 2002 |
| A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed on the piezoelectric substrate and made of a metal or an alloy having a higher specific weight than that of the piezoelectric material of the piezoelectric substrate so as to gene |
| 6369667 |
Surface acoustic wave device and communication device utilizing shear horizontal waves |
April 9, 2002 |
| A surface acoustic wave device includes a quartz substrate having Euler angles (0.degree., .theta., 90.degree..+-.5.degree.) in which .theta. is in a range of 119.degree..ltoreq..theta..ltoreq.140.degree., and an IDT for exciting an SH wave is formed on the quartz substrate by use of an |
| 6369491 |
Surface acoustic wave device and method for manufacturing the same |
April 9, 2002 |
| A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and cont |
