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Inventor: Yeh; Jenn L.
Address: Saratoga, CA
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5410185 |
Internal bridging contact |
April 25, 1995 |
| A bridging contact between internal contacts in a semiconductor integrated circuit is formed which is insulated from any connection to an intervening feature. A first dielectric layer is deposited over the contacts and the intervening feature, followed by an etch stop layer. The etch sto |
| 5169802 |
Internal bridging contact |
December 8, 1992 |
| A bridging contact between internal contacts in a semiconductor integrated circuit is formed which is insulated from any connection to an intervening feature. A first dielectric layer is deposited over the contacts and the intevening feature, followed by an etch stop layer. The etch stop |
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