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Inventor:
Yasumi; Masahiro
Address:
Ibaraki, JP
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
7168321 Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric accele January 30, 2007
The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode










 
 
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