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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Yang; Hee-sung
Address:
Suwon, KR
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6451684 Semiconductor device having a conductive layer side surface slope which is at least 90.degree. a September 17, 2002
A semiconductor device having a conductive layer side surface slope of at least 90.degree. and a method for making the same is provided. An interlayer dielectric film and a conductive layer are formed on a semiconductor substrate. The interlayer dielectric film has a side surface slo


 
 
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