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Inventor: Ya; Chen-Hua
Address: Hsin-Chu, TW
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6737352 |
Method of preventing particle generation in plasma cleaning |
May 18, 2004 |
| A method to prevent particle generation from sputtering clean is disclosed, the method comprises of forming a dielectric layer on a substrate, forming a nitrogen-containing dielectric layer on the dielectric layer, forming a plurality of contact holes in the dielectric layer and the |
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