Resources Contact Us Home
Wu; Wen-Bin
Tao-Yuan Hsien, TW
No. of patents:

Patent Number Title Of Patent Date Issued
7723181 Overlay alignment mark and alignment method for the fabrication of trench-capacitor dram devices May 25, 2010
A small-size (w<0.5 micrometers) alignment mark in combination with a "k1 process" is proposed, which is particularly suited for the fabrication of trench-capacitor DRAM devices which requires highly accurate AA-DT and GC-DT overlay alignment. The "k1 process" is utilized to etch
6987053 Method of evaluating reticle pattern overlay registration January 17, 2006
A method for evaluating reticle registration between two reticle patterns. A wafer is defined and etched to form a first exposure pattern, by photolithography with a first reticle having a first reticle pattern thereon. A photoresist layer is formed over the wafer and defined as a se
6929902 Method of preventing repeated collapse in a reworked photoresist layer August 16, 2005
A method of preventing repeated collapse in a reworked photoresist layer. First, oxygen-containing plasma is applied to remove a collapsed photoresist. Because the plasma containing oxygen reacts with a bottom anti-reflect layer comprising SiO.sub.x N.sub.y, some acids are produced o

  Recently Added Patents
Direct chemical vapor deposition of graphene on dielectric surfaces
Memory device having collaborative filtering to reduce noise
Flash drive
Method of making and using an alpha-glucanase composition to reduce or remove biofilm
Method of analyzing cell structures and their components
Transfer formulas
Communication apparatus, and method and program for controlling same
  Randomly Featured Patents
Switching circuits
Method for producing (+)-zizaene
LVDS driver in bipolar and MOS technology
Slider for magnetic head and magnetic memory apparatus
Process for preparation of 2-chloropyridine
Method and apparatus for selecting a frequency generating element
Method, medium, and system for automatically moving items from a first shopping cart to a second shopping cart
Apparatus and a method for separating one solid component from another solid component in suspension in a liquid
Generating classifications from normalized item attributes
Process for the production of a starch dispersible in boiling water