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Wang; Chuanwei
Science-Based Industrial Park Hsin-Chu, TW
No. of patents:

Patent Number Title Of Patent Date Issued
8105498 Method for fabricating variable parallel plate capacitors January 31, 2012
A method for fabricating micromachined structures is provided. A structure including a dielectric layer, a metal layer and a passivation layer is formed, wherein the dielectric layer has a via thereon. An etching window is formed on the passivation layer. An etching solution is poure
7849742 Out-of-plane sensing device December 14, 2010
An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the proof mass to make

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