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Van Beek; Jozef Thomas Martinus
Eindhoven, NL
No. of patents:

Patent Number Title Of Patent Date Issued
8018307 Micro-electromechanical device and module and method of manufacturing same September 13, 2011
The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the signal path between input and output, and that the
7709285 Method of manufacturing a MEMS device and MEMS device May 4, 2010
A method for manufacturing a micro-electromechanical systems (MEMS) device, comprising providing a base layer (10) and a mechanical layer (12) on a substrate (14), providing a sacrificial layer (16) between the base layer (10) and the mechanical layer (12), providing an etch stop lay
7554425 Electromechanical transducer and electrical device June 30, 2009
The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element
7382205 Transducer and electronic device June 3, 2008
The transducer (1) comprises an electrically conductive resonator element (20) extending in a longitudinal direction having a length (l). It can be elastically deformed by an electrically conductive actuator (30) such that the elastic deformation comprises a change of the length (dl). Th
7303934 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obt December 4, 2007
The invention relates to a method of manufacturing a micro-electromechanical device (10), in which are consecutively deposited on a substrate (1) a first electroconductive layer (2) in which an electrode (2A) is formed, a first electroinsulating layer (3) of a first material, a secon
7176550 Method and device for forming a winding on a non-planar substrate February 13, 2007
The electronic device (10) comprises a capacitor (12) and an inductor (11) and is present on a substrate (1) with an unplanarized surface (2). This is realized in winding (21) of the inductor (11) has a thickness of at least 1 micron and has a planarized upper surface (81). The upper
6538874 Electronic device March 25, 2003
An electronic device having a resonance frequency with a margin of error sufficiently small for high frequency applications. The electronic device includes a first capacitor electrode in a first electrically conducting layer, a dielectric including a layer of dielectric material and a

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