| Patent Number |
Title Of Patent |
Date Issued |
| 7554425 |
Electromechanical transducer and electrical device |
June 30, 2009 |
| The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element |
| 7382205 |
Transducer and electronic device |
June 3, 2008 |
| The transducer (1) comprises an electrically conductive resonator element (20) extending in a longitudinal direction having a length (l). It can be elastically deformed by an electrically conductive actuator (30) such that the elastic deformation comprises a change of the length (dl). Th |
| 7303934 |
Method for manufacturing a micro-electromechanical device and micro-electromechanical device obt |
December 4, 2007 |
| The invention relates to a method of manufacturing a micro-electromechanical device (10), in which are consecutively deposited on a substrate (1) a first electroconductive layer (2) in which an electrode (2A) is formed, a first electroinsulating layer (3) of a first material, a secon |
| 7176550 |
Method and device for forming a winding on a non-planar substrate |
February 13, 2007 |
| The electronic device (10) comprises a capacitor (12) and an inductor (11) and is present on a substrate (1) with an unplanarized surface (2). This is realized in winding (21) of the inductor (11) has a thickness of at least 1 micron and has a planarized upper surface (81). The upper |
| 6538874 |
Electronic device |
March 25, 2003 |
| An electronic device having a resonance frequency with a margin of error sufficiently small for high frequency applications. The electronic device includes a first capacitor electrode in a first electrically conducting layer, a dielectric including a layer of dielectric material and a |
