| Patent Number |
Title Of Patent |
Date Issued |
| 7554167 |
Three-dimensional analog input control device |
June 30, 2009 |
| A method and device for 3-dimensional input finger control of different functions in electronic consumer devices is provided. Certain versions of the Present Invention provide a 3-dimensional input finger interface control device for cell phones, portable gamers, digital cameras, and |
| 7476952 |
Semiconductor input control device |
January 13, 2009 |
| A force input control device suitable for high-volume applications such as cell phones, portable gaming devices and other handheld electronic devices is disclosed. The device comprises a force sensor die formed within semiconductor substrate and containing a force sensor providing el |
| 7367232 |
System and method for a three-axis MEMS accelerometer |
May 6, 2008 |
| A system and method for inputting motion measurement data into a computationally based device are provided. In a first version three-axis accelerometer determines components of an inertial force vector with respect to an orthogonal coordinate system. The accelerometer includes a sens |
| 7318349 |
Three-axis integrated MEMS accelerometer |
January 15, 2008 |
| 3D accelerometer for measuring three components of inertial force (or acceleration) vector with respect to an orthogonal coordinate system, which has high sensitivity due to a big proof mass located within a cavity beneath the surface of the sensor die. The size of the cavity and the |
| 6787052 |
Method for fabricating microstructures with deep anisotropic etching of thick silicon wafers |
September 7, 2004 |
| A method for fabricating semiconductor microstructures with a combination of etching steps, i.e. local RIE, isotropic, etc. followed by deep anisotropic etching. |
| 6700688 |
Rolling mirror apparatus and method of use |
March 2, 2004 |
| A rolling micromirror is disclosed which comprises a micromirror guided in movement by a reference surface. The micromirror is suspended adjacent to the reference surface by a suspension element. An actuator moves the micromirror in relationship with a control signal. The suspension elem |
