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Inventor: U'Ren; Gregory David
Address: Berkeley, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7545552 |
Sacrificial spacer process and resultant structure for MEMS support structure |
June 9, 2009 |
| Disclosed is a microelectromechanical systems (MEMS) device and method of manufacturing the same. MEMS such as an interferometric modulator include a sidewall spacer formed adjacent to a movable mirror. The sidewall spacer may be a sacrificial spacer that is removed during fabrication, o |
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