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Inventor: U'Ren; Gregory D.
Address: Berkeley, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7580172 |
MEMS device and interconnects for same |
August 25, 2009 |
| A microelectromechanical systems device having an electrical interconnect between circuitry outside the device and at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a conductive layer |
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