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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
U'Ren; Gregory D.
Address:
Berkeley, CA
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7580172 MEMS device and interconnects for same August 25, 2009
A microelectromechanical systems device having an electrical interconnect between circuitry outside the device and at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a conductive layer


 
 
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