| |
|
Inventor: U'Ren; Gregory
Address: Berkeley, CA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7423287 |
System and method for measuring residual stress |
September 9, 2008 |
| The invention comprises devices and methods for determining residual stress in MEMS devices such as interferometric modulators. In one example, a device measuring residual stress of a deposited conduct material includes a material used to form a MEMS device, and a plurality of discon |
|
|
|
