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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Tukuda; Kazuaki
Address:
Kawasaki, JP
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
4654113 Process for fabricating a semiconductor device March 31, 1987
A method of forming an insulating layer having a planar surf on a lower wiring layer having given patterns steps at the shoulders of the patterns. On a lower wiring layer, a lower insulating layer is formed and a heat resistive material is coated over the lower insulative layer to form a










 
 
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