| Patent Number |
Title Of Patent |
Date Issued |
| 6924497 |
Systems for measuring stresses in line features formed on substrates |
August 2, 2005 |
| Methods and systems for evaluating stresses in line features formed on substrates. Stresses may be computed from measured curvature information based on simple analytical functions. The curvature information can be obtained optically by, e.g., a coherent gradient sensing method, to obtai |
| 6781702 |
Determining large deformations and stresses of layered and graded structures to include effects |
August 24, 2004 |
| Techniques for determining large deformation of layered or graded structures to include effects of body forces such as gravity, electrostatic or electromagnetic forces, and other forces that uniformly distribute over the structures, support forces, and concentrated forces. A real-tim |
| 6641893 |
Functionally-graded materials and the engineering of tribological resistance at surfaces |
November 4, 2003 |
| An article is provided that is highly resistant to localized normal indentation, or indentation tensile stresses, against its surface. The article is a stacked array of at least five layer units each having local anisotropy in at least one direction. Each unit has an adjacent unit that |
| 6600565 |
Real-time evaluation of stress fields and properties in line features formed on substrates |
July 29, 2003 |
| Methods and systems for evaluating stresses in line features formed on substrates. Stresses may be computed from measured curvature information based on simple analytical functions. The curvature information can be obtained optically by, e.g., a coherent gradient sensing method, to obtai |
| 6513389 |
Technique for determining curvatures of embedded line features on substrates |
February 4, 2003 |
| Techniques for evaluating curvatures in line features embedded in a different material layer formed on a substrate. A model based a uniform layer formed over a substrate may be used to represent a structure with parallel line features embedded in a layer formed over the substrate. The |
| 6311135 |
Method and apparatus for determining preexisting stresses based on indentation or other mechanic |
October 30, 2001 |
| Provided are methods and apparatus for determining from indentation testing the preexisting stress and/or effective strain in a section of a material. The invention also provides methods and apparatus for determining the variation of the stress with depth in the material (e.g. the gradie |
| 6247355 |
Depth sensing indentation and methodology for mechanical property measurements |
June 19, 2001 |
| An indentation measurement apparatus is retrofittable onto any of a variety of load-applying frames and includes a mount for mounting an indenter of any geometry (for example blunt or sharp). The arrangement is very stiff and mechanical values including Young's modulus, strain hardening |
| 6155104 |
Method and apparatus for determining preexisting stresses based on indentation or other mechanic |
December 5, 2000 |
| Provided are methods and apparatus for determining from indentation testing the preexisting stress and/or effective strain in a section of a material. The invention also provides methods and apparatus for determining the variation of the stress with depth in the material (e.g. the gradie |
| 6134954 |
Depth sensing indentation and methodology for mechanical property measurements |
October 24, 2000 |
| An indentation measurement apparatus is retrofittable onto any of a variety of load-applying frames and includes a mount for mounting an indenter of any geometry (for example blunt or sharp). The arrangement is very stiff and mechanical values including Young's modulus, strain hardening |
| 5999887 |
Method and apparatus for determination of mechanical properties of functionally-graded materials |
December 7, 1999 |
| Techniques for the determination of mechanical properties of homogenous or functionally-graded materials from indentation testing are presented. The technique is applicable to indentation on the nano-scale through the macro-scale including the geological scale. The technique involves |
| 5847283 |
Method and apparatus for the evaluation of a depth profile of thermo-mechanical properties of la |
December 8, 1998 |
| A technique for determining properties such as Young's modulus, coefficient of thermal expansion, and residual stress of individual layers within a multi-layered sample is presented. The technique involves preparation of a series of samples, each including one additional layer relative t |
