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Spence; Daniel P.
Carlsbad, CA
No. of patents:

Patent Number Title Of Patent Date Issued
8247617 Group 2 metal precursors for depositing multi-component metal oxide films August 21, 2012
Novel Sr and Ba complexes containing both beta-diketonates and N-methyl-pyrrolidone were synthesized and characterized. TGA experiments indicated these complexes are volatile, they can be employed as precursors for ALD strontium titanate (STO) or barium strontium titanate films (BST)
7723493 Metal complexes of tridentate BETA -ketoiminates May 25, 2010
Metal-containing complexes of a tridentate beta-ketoiminate, one embodiment of which is represented by the structure: ##STR00001## wherein M is a metal such as calcium, strontium, barium, scandium, yttrium, lanthanum, titanium, zirconium, vanadium, tungsten, manganese, cobalt, iron,

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