| Patent Number |
Title Of Patent |
Date Issued |
| 8251091 |
Temperature insensitive mass flow controller |
August 28, 2012 |
| A temperature insensitive mass flow controller comprising a main flow line, a capillary tube coupled to the main flow line across a bypass a thermal sensing element coupled to the capillary tube and a mass flow controller housing adapted to at least cover the capillary tube. A first |
| 8196601 |
Thermal flow sensor with zero drift compensation |
June 12, 2012 |
| One embodiment of the present invention comprises a thermal flow sensor having a first capillary tube coupled to a mass flow controller main flow line across a mass flow controller bypass. A first pair of sensing elements is coupled to the first capillary tube. The thermal sensor also |
| 8195312 |
Multi-mode control loop with improved performance for mass flow controller |
June 5, 2012 |
| One embodiment of the invention comprises a mass flow controller comprising a digital controller, a valve, and a sensor. The digital controller is adapted to implement a control loop having a proportional signal modifier in series with an integral signal modifier. The integral signal |
| 8160833 |
Thermal mass flow sensor with improved response across fluid types |
April 17, 2012 |
| One embodiment of the present invention comprises a mass flow controller. The mass flow controller may comprise a pair of thermal sensing elements, a bridge circuit adapted to receive at least one first signal from the pair of thermal sensing elements and a differential amplifier adapted |
| 8131400 |
Adaptive on-tool mass flow controller tuning |
March 6, 2012 |
| One embodiment comprises a method of providing accurate mass flow controller flow rate data for a non-manufacturing-tuning-gas. The mass flow controller may be operated at a setpoint greater than 50%. Data may be recorded to a mass flow controller memory. The setpoint may then be cha |
| 7971604 |
Flow controller delivery of a specified-quantity of a fluid |
July 5, 2011 |
| A system and method for delivering a specified-quantity of a fluid using a flow controller based on a fluid delivery profile is described. One embodiment includes a fluid delivery profile that includes a delivery time window with a plurality of set points that each correspond with a |
| 7971480 |
Mass flow controller having a first pair of thermal sensing elements opposing a second pair of t |
July 5, 2011 |
| One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor |
| 7640078 |
Multi-mode control algorithm |
December 29, 2009 |
| A system and method for controlling a flow of a fluid using a multi-mode control algorithm is described. One embodiment includes a method for changing the multi-mode control algorithm from a closed-loop mode to an open-loop mode. The method includes receiving at least one sensor indi |
| 7603186 |
Adaptive response time closed loop control algorithm |
October 13, 2009 |
| A system and method for controlling a flow of a fluid using an adaptive closed-loop-control algorithm is described. One embodiment includes a method for receiving a set point indicator and/or a sensor indicator generated by a sensor. A response time of a closed-loop-control algorithm |
