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Inventor:
Smirnov; Alexei V.
Address:
Fort Collins, CO
No. of patents:
9
Patents:












Patent Number Title Of Patent Date Issued
8251091 Temperature insensitive mass flow controller August 28, 2012
A temperature insensitive mass flow controller comprising a main flow line, a capillary tube coupled to the main flow line across a bypass a thermal sensing element coupled to the capillary tube and a mass flow controller housing adapted to at least cover the capillary tube. A first
8196601 Thermal flow sensor with zero drift compensation June 12, 2012
One embodiment of the present invention comprises a thermal flow sensor having a first capillary tube coupled to a mass flow controller main flow line across a mass flow controller bypass. A first pair of sensing elements is coupled to the first capillary tube. The thermal sensor also
8195312 Multi-mode control loop with improved performance for mass flow controller June 5, 2012
One embodiment of the invention comprises a mass flow controller comprising a digital controller, a valve, and a sensor. The digital controller is adapted to implement a control loop having a proportional signal modifier in series with an integral signal modifier. The integral signal
8160833 Thermal mass flow sensor with improved response across fluid types April 17, 2012
One embodiment of the present invention comprises a mass flow controller. The mass flow controller may comprise a pair of thermal sensing elements, a bridge circuit adapted to receive at least one first signal from the pair of thermal sensing elements and a differential amplifier adapted
8131400 Adaptive on-tool mass flow controller tuning March 6, 2012
One embodiment comprises a method of providing accurate mass flow controller flow rate data for a non-manufacturing-tuning-gas. The mass flow controller may be operated at a setpoint greater than 50%. Data may be recorded to a mass flow controller memory. The setpoint may then be cha
7971604 Flow controller delivery of a specified-quantity of a fluid July 5, 2011
A system and method for delivering a specified-quantity of a fluid using a flow controller based on a fluid delivery profile is described. One embodiment includes a fluid delivery profile that includes a delivery time window with a plurality of set points that each correspond with a
7971480 Mass flow controller having a first pair of thermal sensing elements opposing a second pair of t July 5, 2011
One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor
7640078 Multi-mode control algorithm December 29, 2009
A system and method for controlling a flow of a fluid using a multi-mode control algorithm is described. One embodiment includes a method for changing the multi-mode control algorithm from a closed-loop mode to an open-loop mode. The method includes receiving at least one sensor indi
7603186 Adaptive response time closed loop control algorithm October 13, 2009
A system and method for controlling a flow of a fluid using an adaptive closed-loop-control algorithm is described. One embodiment includes a method for receiving a set point indicator and/or a sensor indicator generated by a sensor. A response time of a closed-loop-control algorithm










 
 
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