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Inventor: Simons, legal representative; Carita
Address: Lexington, TX
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 8134684 |
Immersion lithography using hafnium-based nanoparticles |
March 13, 2012 |
| Method, apparatus, and composition of matter suited for use with, for example, immersion lithography. The composition of matter includes hafnium dioxide nanoparticles having diameters less than or equal to about 15 nanometers. The apparatus includes the composition of matter, a light |
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