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Inventor:
Shoji; Tatsuo
Address:
Nagoya, JP
No. of patents:
6
Patents:












Patent Number Title Of Patent Date Issued
7785441 Plasma generator, plasma control method, and method of producing substrate August 31, 2010
The present invention aims to provide a plasma generator capable of creating a spatially uniform distribution of high-density plasma. This object is achieved by the following construction. Multiple antennas 16 are located on the sidewall of a vacuum chamber 11, and a RF power source
7567037 High frequency power supply device and plasma generator July 28, 2009
A high frequency power supplying device and a plasma generation device using the same includes: two or more inductive antennas; high frequency power sources, respectively supplying power to the antennas; and a vacuum chamber on which the antennas are provided so as to generate a plasma b
7098599 Plasma generator August 29, 2006
The whole antenna conductor is housed in the interior of a vacuum container of a plasma generator thereby to eliminate the need for an insulating partition or a top plate so that the whole induction field radiated from the antenna can be effectively utilized. Furthermore, the occurre
5122251 High density plasma deposition and etching apparatus June 16, 1992
A high density ionized plasma is generated in a source chamber using a single loop disposed in a plane that intercepts the central axis of the source chamber perpendicularly or at a lesser angle and spaced from the closed end of the chamber. With a longitudinal magnetic field and an iner
5091049 High density plasma deposition and etching apparatus February 25, 1992
The high density RF plasma generator of this invention uses special antenna configurations (15) to launch RF waves at low frequency such as 13.56 MHz along a magnetic field supplied by an external magnetic field generator (16.17) in a discharge space (14) where the working gas is introdu
4990229 High density plasma deposition and etching apparatus February 5, 1991
The high density RF plasma generator of this invention uses special antenna configurations (15) to launch RF waves at low frequency such as 13.56 MHz along a magnetic field supplied by an external magnetic field generator (16.17) in a discharge space (14) where the working gas is introdu










 
 
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